| LEC # | TOPICS | KEY DATES |
|---|---|---|
| 1 | Overview of Semiconductor Manufacturing | |
| Statistical Process Control | ||
| 2 | Statistics Review: Distributions | |
| 3 | Statistics Review: Estimation | PS #1 Due |
| 4 | Hypothesis Tests and Control Chart Introduction | |
| 5 | Control Charts | |
| 6 | Advanced Control Charts, Nested Variance | PS #2 Due |
| Experimental Design | ||
| 7 | Analysis and Design of Experiments | |
| 8 | ANOVA, Variance Component Estimation | PS #3 Due |
| 9 | MANOVA, Factorial Experiments Quiz #1 |
|
| Yield and Yield Learning | ||
| 10 | Design of Experiments and Response Surface Modeling | |
| 11 | RSM and Regression | PS #4 Due |
| 12 | Yield Management and Modeling | |
| 13 | Yield Modeling | PS #5 Due |
| Advanced Process Control | ||
| 14 | Spatial Modeling | |
| 15 | Sensors and Signals | PS #6 Due |
| 16 | PCA and Time Series | |
| 17 | Run by Run Control | Critical Paper Review Due |
| 18 | Real Time Control, Scheduling | |
| Factory Operation and Design | ||
| 19 | Scheduling Quiz #2 |
PS #7 Due |
| 20 | Planning | |
| 21 | Factory Design and Efficiency | |