Introduction; electron-specimen interactions; electron detectors; scanning electron imaging (backscattered and secondary electron, BSE and SE); cathodoluminescence (CL) imaging; qualitative analysis using BSE imaging and energy dispersive spectrometry (EDS).
Problem set 1 out
2
X-ray generation, emission, detection and measurement; wavelength dispersive spectrometer (WDS); analyzing crystals and proportional counters; WDS signal processing with single channel analyzer; compositional imaging (X-ray mapping) using WDS.
Problem set 2 out
3
Quantitative analysis using WDS; sample preparation; carbon coating; peak and background in WD spectra; detector settings through pulse height analysis; peak overlap corrections.
Problem set 3 out
4
Matrix (ZAF) corrections in quantitative analysis; φ(ρz) corrections.